| 摘要 |
PROBLEM TO BE SOLVED: To solve problems of a sealing mechanism for sealing a trap room in which a seal ring 12 and a coil spring 16 are used and a pressurized nitrogen gas fed into a housing 3 is used for pressing the seal ring 12 to crash O-rings 14, 14 of the seal ring 12 for sealing the trap room (vacuum space), that the seal responsiveness of the seal ring 12 with the pressurized nitrogen gas is bad considering the complexity of the sealing structure and that a large load is applied to a vacuum pump by the pressurized nitrogen gas bursting into the trap room. SOLUTION: In the switching trap device 1, a cylinder body 18 is connected to the base end of a piston 9B of a double acting air cylinder 9. The cylinder body 18 is connected to the piston 9B via a flange part 18A formed at the top in such a way that the cylinder body can be finely moved in the lateral direction of a second partition wall 7, and an O-ring 21 is interposed between the peripheral rim of the flange part 18A and the peripheral edge of the second partition wall 7.
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