| 摘要 |
PROBLEM TO BE SOLVED: To provide a tuning-fork oscillator having high detection accuracy of angular velocity compared with hitherto, an angular velocity sensor and a manufacturing method of the angular velocity sensor. SOLUTION: This tuning-fork oscillator 21 has a base 22 where projecting fixed part 22a, 22b are formed, and an excitation axis 23 and a detection axis 24 erected from the base 22 and arranged oppositely, and comprises a piezoelectric element. In the oscillator, the excitation axis 23 is plane-vertically polarized so that excitation electrodes 25a, 25d and excitation electrodes 25b, 25c have mutually reverse polarization directions, and the detection axis 24 is plane- vertically polarized so that detection electrodes 26a, 26f and detection electrodes 26c, 26d on both ends have mutually reverse polarization directions, and inplane- polarized so that center detection electrodes 26b, 26e have zero potential between themselves and the detection electrodes 26a, 26f, 26c, 26d on both ends, and the excitation electrodes 25b, 25c and the detection electrodes 26c, 26d have mutually the same polarization direction. |
