发明名称 |
PHOTOACID GENERATOR SYSTEMS FOR SHORT WAVELENGTH IMAGING |
摘要 |
New photoacid generator systems that comprise a sensitizer compound and one or more photoacid generator compounds are provided and photoresist compositions that comprise such systems. Photoacid generator systems of the invention are particularly useful as photoactive components of photoresists imaged at short wavelengths such as 248 nm, 193 nm and 157 nm. |
申请公布号 |
WO02069039(A2) |
申请公布日期 |
2002.09.06 |
申请号 |
WO2002US09191 |
申请日期 |
2002.02.25 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
CAMERON, JAMES, F.;POHLERS, GERHARD |
分类号 |
G03F7/004;G03F7/038;G03F7/039 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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