| 发明名称 |
Process and device for marking individual semiconductor chips on wafers uses a small drop of fluid wax |
| 摘要 |
A process for marking individual chips on a wafer uses a fluid drop of wax of small volume which solidifies on being placed onto the chip. An Independent claim is also included for a device for implementing the process above.
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| 申请公布号 |
DE10107594(A1) |
申请公布日期 |
2002.09.05 |
| 申请号 |
DE2001107594 |
申请日期 |
2001.02.17 |
| 申请人 |
MICRODROP GESELLSCHAFT FUER MIKRODOSIERSYSTEME MBH |
发明人 |
GLAETTLI, ALFRED;DOERING, MICHAEL;MEYER, WILHELM |
| 分类号 |
H01L23/544;(IPC1-7):H01L23/544 |
主分类号 |
H01L23/544 |
| 代理机构 |
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