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发明名称
Verfahren zur Bestimmung des größten Lagefehlers von Strukturelementen innerhalb eines Loses von Wafern
摘要
申请公布号
DE10048782(C2)
申请公布日期
2002.09.05
申请号
DE20001048782
申请日期
2000.09.29
申请人
ITEMIC AG
发明人
WERNEKE, TORSTEN
分类号
H01L21/66;(IPC1-7):H01L21/66;H01L23/544
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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