发明名称 Probe for measuring leakage magnetic field
摘要 A probe for measuring a leakage magnetic field includes a substrate, a flexible cantilever having one end fixed to the substrate and a free end, and at least one magneto resistive element arranged on the free end of the cantilever. The magneto resistive element has a width within a range from 10 nm to 1 mum as measured in a direction vertical to a longitudinal direction of the cantilever and also to a direction in which the cantilever can be deflected.
申请公布号 US2002121897(A1) 申请公布日期 2002.09.05
申请号 US20010944059 申请日期 2001.08.30
申请人 MUKASA KOICHI;SUEOKA KAZUHISA;KIMURA MICHIYA;SAWAMURA MAKOTO;HOSOI HIROTAKA 发明人 MUKASA KOICHI;SUEOKA KAZUHISA;KIMURA MICHIYA;SAWAMURA MAKOTO;HOSOI HIROTAKA
分类号 G01B7/34;G01B7/00;G01N27/72;G01Q60/54;G01Q70/12;G01R15/20;G01R33/02;G01R33/09;H01L43/08;(IPC1-7):G01R33/02 主分类号 G01B7/34
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