发明名称 |
Probe for measuring leakage magnetic field |
摘要 |
A probe for measuring a leakage magnetic field includes a substrate, a flexible cantilever having one end fixed to the substrate and a free end, and at least one magneto resistive element arranged on the free end of the cantilever. The magneto resistive element has a width within a range from 10 nm to 1 mum as measured in a direction vertical to a longitudinal direction of the cantilever and also to a direction in which the cantilever can be deflected.
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申请公布号 |
US2002121897(A1) |
申请公布日期 |
2002.09.05 |
申请号 |
US20010944059 |
申请日期 |
2001.08.30 |
申请人 |
MUKASA KOICHI;SUEOKA KAZUHISA;KIMURA MICHIYA;SAWAMURA MAKOTO;HOSOI HIROTAKA |
发明人 |
MUKASA KOICHI;SUEOKA KAZUHISA;KIMURA MICHIYA;SAWAMURA MAKOTO;HOSOI HIROTAKA |
分类号 |
G01B7/34;G01B7/00;G01N27/72;G01Q60/54;G01Q70/12;G01R15/20;G01R33/02;G01R33/09;H01L43/08;(IPC1-7):G01R33/02 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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