| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and device for carrying in and out a sample that can carry in a sample into a treatment room that is maintained in a vacuum atmosphere through a preliminary room in which pressure can be adjusted without causing a foreign object to be adhered to the sample and for example, can contribute to the realization of the local cleaning of a system for producing a mask that is used in a process for manufacturing a semiconductor device. SOLUTION: A container 24 for carrying a sample where a ventilation property is secured by a filter for eliminating dust/dirt is used, and a sample 23 is accommodated in the container 24 for carrying a sample in an atmosphere 22 that is maintained to be clean when carrying the sample 23 into a treatment room 7. After the container 24 for carrying the sample is carried into a preliminary room 3, the inside of the preliminary room 3 is evacuated to a vacuum atmosphere and then the sample 23 is taken out of the container 24 for carrying a sample and is carried into the treatment room 7.</p> |
