ACTUATOR AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an actuator which can perform an expansion/contraction operation at comparatively fast response speed with good controllability by electric stimulus, can obtain displacement that is sufficiently larger than a piezo element, can perform the expansion/contraction operation in a specified direction, does not need a solution supply system and has the characteristic of good balance. SOLUTION: A KTiNbO5 thin film being an interlayer compound is formed on a (001) conductive SrTiO3 substrate 1, ions are exchanged and a HTiNbO5 thin film is formed. Trimethyl stearyl ammonium ions (TMSA) are intercalation with respect to the HTiNbO5 and therefore a (TMSA) TN thin film 2 is formed. An upper electrode 3 is formed on the (TMSA) TN thin film 2 and a lower electrode 4 is formed at the back of the SrTiO3 substrate 1 so as to constitute the thin film actuator. Thus, the expansion/contraction operation is performed by applying voltage between the upper electrode 3 and the lower electrode 4.