发明名称 POLISHING SENSOR OF MAGNETIC HEAD PROVIDED WITH MAGNETO- RESISTANCE EFFECT ELEMENT, AND POLISHING CONTROL METHOD USING THE SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a polishing sensor capable of surely and stably obtaining a correct polishing amount even during the manufacturing of a smaller magnetic head slider, and a polishing control method using the polishing sensor, capable of surely and stably adjusting an MR height to a correct value. SOLUTION: The polishing sensor 51 is provided with a resistor film having resistance changed according to a polishing amount, and a pair of connecting pads 53 and 54 provided on the element forming surface of a magnetic head 52 having an MR element, and electrically connected to both ends of the resistor film. In this case, the pair of connecting pads are composed of a first connecting pad 54a formed on the far side of a polishing surface 55, and a second connecting pad 54b formed on the near side of the polishing surface, and the edge of the first connecting pad 54a facing the second connecting pad 54b is inclined in one direction based on the polishing surface.
申请公布号 JP2002245606(A) 申请公布日期 2002.08.30
申请号 JP20010032171 申请日期 2001.02.08
申请人 SHINKA JITSUGYO KK 发明人 FUKUROI OSAMU
分类号 B24B49/04;B24B49/10;G11B5/31;G11B5/39;(IPC1-7):G11B5/39 主分类号 B24B49/04
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