Verfahren zur Herstellung eines Quarzglastiegels und Vorrichtung zur Durchführung dieses Verfahrens

摘要

A quartz glass crucible obtained by heating and fusing a rotating layer (3) charged with a powder of silicon dioxide, characterized in that the impurity elements contained in said quartz glass crucible is controlled as such that copper, chromium, and nickel each amount for 0.5 ppb or less, that iron amount for 120 ppb or less, and that sodium amount for 20 ppb or less; a method for producing a quartz glass crucible characterized in that it comprises supplying a powder of silicon dioxide to a rotatable mold (1) having an opening on the top thereof, thereby forming a layer (3) charged with silicon dioxide along the inner peripheral wall of the mold, and internally heating and fusing the layer (3), provided that heating and fusing is effected while covering the opening portion of the mold (1) with a lid (5) having 2 or more holes (6;7), and ventilating the mold (1) to discharge the high temperature gaseous atmosphere through the holes (6;7); and an apparatus for use in the method for producing the quartz glass crucible above. $$