| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray filter of which the thickness can be easily altered finely, and an X-ray fluorescence analyzer. SOLUTION: An X-ray fluorescence analyzer 100 is an energy dispersion type total reflection X-ray fluorescence analyzer and equipped with a synchrotron(SR) radiation source 101, a slit 102 for narrowing the continuous light 1 emitted from the SR radiation source 101, and X-ray filter 103 made of silicon for making continuous light 1 quasi-monochromatic to convert the same to X-rays 2, having to irradiate a sample S and a detector 104 for detecting fluorescent X-rays 3 generated from the sample S.
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