VAPOR-COATING SYSTEM INCLUDING COATING CONTAINER HAVING CONTROL OF VAPOR-SOURCE ACTIVITY

摘要

PROBLEM TO BE SOLVED: To provide a vapor coating system in which the activity of aluminum- containing vapor source can freely be changed by controlling the flow of sweep gas flowing into a vapor coating container. SOLUTION: The vapor coating system (20) can be operated so as to coat a workpiece arranged at the inside thereof. The vapor coating system (20) is provided with the vapor coating container (22) having a wall (28). At least one inlet port (34) and at least one outlet port (36) pass through the container wall (28). The total outlet port area of all the outlet ports (36) is smaller than the total inlet port area of all the inlet ports (34). The system is further provided with a source (38) of a sweeping gas communicated with the inlet port (34), and a source (44) of a coating vapor disposed so as to feed a coating vapor into the vapor coating container 22.