发明名称 |
POLISHING DISK WITH END-POINT DETECTION PORT |
摘要 |
<p>The invention provides a polishing disk (10) comprising (a) a body comprising a front surface (11), a back surface (12), and a peripheral surface (13), (b) a polishing surface, (c) an end-point detection port (15) extending through the body from the front surface to the back surface, and (d) a drainage channel (16) in fluid communication with the end-point detection port (15). The invention further provides a method of preparing such a polishing disk and a method of polishing a substrate with such a polishing disk.</p> |
申请公布号 |
WO02064315(A1) |
申请公布日期 |
2002.08.22 |
申请号 |
WO2002US04587 |
申请日期 |
2002.02.05 |
申请人 |
CABOT MICROELECTRONICS CORPORATION |
发明人 |
SEVILLA, ROLAND, K.;HICKS, JAMES, A.;JONES, JEREMY |
分类号 |
B24B37/013;B24B37/20;B24B49/04;B24D7/12;B24D13/14;H01L21/304;(IPC1-7):B24B37/04;B24D13/12 |
主分类号 |
B24B37/013 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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