| 摘要 |
In order to realize high-speed and highly efficient pattern data transmission without enlarging the size of circuits, a pattern data transmission device is provided which transmits compressed pattern data for generating a test pattern to be used for the inspection of a semiconductor integrated circuit from an external storage device to a pattern memory of a pattern generating device comprises a decompression section which determines whether decompressed pattern data is the same as decompressed pattern data previously written in a pattern memory according to compressed pattern data when writing the decompressed pattern data inside the compressed pattern data into a pattern memory, and an automatic disposition section which reads out the same decompressed pattern data on the pattern memory according to memory control information inputted from the decompression section and makes a copy of the same decompressed pattern data on the pattern memory.
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