发明名称 |
System of beam narrowing for resolution enhancement and method therefor |
摘要 |
A system of beam narrowing for resolution enhancement produces a narrowed beam for use in surface imaging. The system of beam narrowing for resolution enhancement uses a Fabry-Perot cavity to sharpen the intensity profile of a light source imaged through the system. The optical distance between reflective surfaces forming the Fabry-Perot cavity is tuned to select one of the surfaces as a target surface. The beam width is thereby optimized to a minimum width at the selected target surface. Multiple Fabry-Perot cavities can be cascaded by interposing one or more additional partly reflective surfaces between a first surface and a second underlying surface. The optical distances between all of the surfaces are tuned to select a target surface. The beam width is optimized at the selected target surface to produce a beam narrower than the beam produced by a single Fabry-Perot cavity.
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申请公布号 |
US2002113974(A1) |
申请公布日期 |
2002.08.22 |
申请号 |
US20010789913 |
申请日期 |
2001.02.21 |
申请人 |
CLARK BRYAN KEVIN |
发明人 |
CLARK BRYAN KEVIN |
分类号 |
G01J3/433;G01N21/39;G02B26/00;(IPC1-7):G01B9/02 |
主分类号 |
G01J3/433 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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