| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge pumping gas laser equipment having an alignment mechanism capable of executing alignment in a state of high repetition oscillation at few kHz and an alignment method therefor. SOLUTION: In a high repetition gas laser equipment with a laser chamber 1 and a narrow-band realizing unit, the unit is constructed in such a way that optical devices including a slit 5, an expanding prism 32 and a grating 31 are housed in easing 4 purged with an inert gas, and the unit is provided with the alignment mechanism 21, 22 and 23 capable of aligning the slit 5 from outside the easing 4 with the slit 5 purged by the inert gas in the easing 4.
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