| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of remote-controlling gas flow in a trace range less than 1 sccm. SOLUTION: This method of controlling trace flow of the gas uses a control system obtained by combining an effect for reducing the trace flow of the gas by bringing a dielectric having a high dielectric constant and a solid in contact with each other and passing the gas between them and applying an electric field to generate the electrostatic attraction to reduce a clearance between the dielectric and the solid and an effect for increasing the trace flow of the gas by bringing the solid in contact with the high dielectric at a side opposite to the gas passing side thereof and applying an electric field to generate the electrostatic attraction to increase the trace flow of the gas.
|
