| 摘要 |
PROBLEM TO BE SOLVED: To lower the manufacture cost of an electrode substrate for a liquid crystal device, which is used for a p-Si type TFT-LCD by performing high- precision OS inspection, without causing increase in the area of a row electrode driving circuit or the facility investment amount and decreasing defective substrates moving into cell process. SOLUTION: End parts of row electrodes G1, G2,..., Gm, which are not connected to a row electrode driving circuit 15, are connected to wires 101 on an array substrate, and the wires 101 are connected to a probing pad 102a. For inspection, a current flowing on the basis of the potential difference between a voltage applied from an array tester 110 to the wires 101 and voltages applied from the row electrode driving circuit 15 to the row electrodes G1, G2,..., Gm is measured to inspect whether the row electrodes G1, G2,..., Gm are defective electrically.
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