| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspecting equipment and a surface inspection method, wherein a surface of an object to be inspected on which a mirror reflection region and an irregular reflection region coexist can be efficiently inspected or closely inspected. SOLUTION: The surface inspecting equipment 10 to inspect the surface of the object 1 to be inspected on which the mirror reflection region 3 and the irregular reflection region 2 coexist includes an optical system 10a to irradiate a beam light to the object 1 to be inspected, a screen 19 which is arranged in a regular reflective direction of the irradiated beam light and receives the light reflected by the object 1 to be inspected, a first light-gathering optical system 21 which gathers a light reflected by the screen 19, and a first optical detector 22 which receives the light gathered. The beam light is designed to scan the surface of the object 1 to be inspected, and a position detector 15 is provided to detect a relative position between the object 1 to be inspected and scanned as above and the beam light.
|
