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发明名称
Verfahren zur Herstellung einer Sperrbeschichtung mittels plasmaunterstütztem CVD
摘要
申请公布号
DE69331291(T2)
申请公布日期
2002.08.08
申请号
DE19936031291T
申请日期
1993.11.10
申请人
ENERGY CONVERSION DEVICES, INC.
发明人
IZU, MASATSUGU;DOTTER, II;OVSHINSKY, R.;HASEGAWA, WATARU
分类号
C23C16/42;B65D65/42;C23C16/02;C23C16/40;C23C16/50;C23C16/511;C23C16/54;H01J37/32;H05H1/46;(IPC1-7):C23C16/02;B05D1/04;B05D3/06;B29D22/00;B29D23/00;B65D23/02
主分类号
C23C16/42
代理机构
代理人
主权项
地址
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