A displacement responsive device e.g. a measurement probe (110) is disclosed. Displacement of a stylus (130) causes resilient movement of a carriage (134) supported by planar springs (112) and (114). This movement is detected by a capacitance sensor (160), formed from two cylinders (164) and (166). The cylinders move in at least three degrees of freedom and changes in their capacitance during the said movement can be determined by a circuit (e.g. Fig 5). Movement in x, y and z directions can be sensed.
申请公布号
WO02061378(A1)
申请公布日期
2002.08.08
申请号
WO2002GB00413
申请日期
2002.01.30
申请人
RENISHAW PLC;THOMAS, DAVID, KENNETH;LOACH, ANDREW;FERGUSON, GRAHAM, RICHARD
发明人
THOMAS, DAVID, KENNETH;LOACH, ANDREW;FERGUSON, GRAHAM, RICHARD