| 摘要 |
PURPOSE:To prevent the damage of optical apparatus and to prevent the defective processing arising from the damage by displaying the urgency for cleaning when the laser power absorbed by the optical apparatus exceeds the ratio determined for the power outputted from an oscillator. CONSTITUTION:The laser power absorbed by a bend mirror 3 is measured by an absorbed light measuring means 6a when laser light 2 is oscillated from the laser oscillator 1 and is reflected by the mirror 3. The output of the means 6 and the laser power which is measured by an output light measuring means 7 and is outputted therefrom are compared by a comparing means 8. The need for cleaning the mirror 3 is displayed by a display means 9 when the laser power absorbed in the mirror 3 exceeds the specified ratio with the laser power outputted from the oscillator 1. The laser power absorbed by a processing lens 5 is similarly measured by an absorbed light measuring means 6b and is compared with the output which is measured by the output light measuring means 7 and is emitted from the oscillator 1 in the comparing means 8. The need for cleaning the lens 5 is displayed by the display means 9 when the result thereof exceeds the specified ratio. |
