Silicon wafer and its method of fabrication,申请号EP20010103569-传众专利搜索

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发明名称	Silicon wafer and its method of fabrication
摘要
申请公布号	EP1136596(B1)	申请公布日期	2002.08.07
申请号	EP20010103569	申请日期	2001.02.20
申请人	WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AKTIENGESELLSCHAFT	发明人	AMMON VON, WILFRIED, DR.;SCHMOLKE, RUEDIGER, DR.;DAUB, ERICH, DR.;FREY, CHRISTOPH, DR.
分类号	C30B29/06;C30B15/00;H01L21/208;H01L21/26;H01L21/324;(IPC1-7):C30B15/00	主分类号	C30B29/06
代理机构		代理人
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