| 摘要 |
<p>PURPOSE:To obtain an X-ray mask membrane having a quality of compactness and a sufficient strength by a method wherein nitrogen and low aliphatic hydrocarbon are mixed as reactive gases in argon of a carrier gas and reactive ion plating is conducted therewith. CONSTITUTION:A silicon substrate 1 and a heating crucible 5 with boron, an evaporation source, put therein are opposed to each other in a vacuum vessel. Between the crucible 5 and an acceleration electrode 6 an ionizing grid 7 is provided to ionize a reaction gas flowing in. The reaction vessel is evacuated, argon is used as a carrier gas, nitrogen of 1-10 % to an entire gas and also methane, lower aliphatic hydrocarbon, of 1-10 % thereto are mixed as reaction gases in the carrier gas, and reactive ion plating is conducted therewith. Thereby a membrane of hydrogenated boron carbide nitride is formed on the substrate 1. By this method, an X-ray mask membrane having a quality of compactness and a sufficient strength can be obtained.</p> |
