| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it is difficult to prepare a device with stable characteristics when a micromirror and an amplifier circuit are integrated together on a semiconductor substrate, since the inclination of a substrate crystal axis is different from that of a usual substrate for preparing an IC and to realize the miniaturization of an optical pickup device. SOLUTION: As the substrate for an optical pickup, a semiconductor substrate having on the surface of a substrate 101 a layer 102 which is different in crystal axis inclination angle from the substrate is used. It is possible to prepare the device with stable characteristics and realize the miniaturization of the pickup device. |
