| 摘要 |
<p>A halide gas separating and collecting device for separating and collecting halide gas from mixed gas containing the halide gas, wherein at least first and second stage separating membrane modules are stacked in multiple stages; a halide gas separating and collecting method, comprising the steps of feeding the mixed gas containing the halide gas to the gas inlet of the first stage separating membrane module, feeding the gas passed through the previous separating membrane module to the gas inlets of the second and subsequent stage separating membrane modules, recycling the gas unpassed through the second and subsequent stage separating membrane modules to the gas inlet of the first stage separating membrane module, and controlling the flow of the gas unpassed through the first stage separating membrane module by a gas flow control valve connected to the unpassed gas outlet of the first stage separating membrane module, whereby the halide gas can be separated and collected as unpassed gas at a high density and a high collection rate.</p> |
