| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device for preventing a running out of gaseous raw material in a process in which a deposited film is formed or an etching is proceeded in correspondence with the kind of gas by irradiating the surface of a specimen with a beam in the environment of the gas. SOLUTION: The total amount of the gaseous raw material which is to be consumed in the whole process is calculated when the machining process and a machining position for an automatic machining are registered, and a warning signal is displayed for replacing a package of the gaseous raw material with a new one if the residual amount of the gaseous raw material is short for completing the whole registered process. Further, an average consumption of each kind of gas for a day is calculated and possible days before each gaseous raw material is replaced are calculated and displayed.</p> |
