| 摘要 |
An inspection device for inspecting pattern shapes of rectiles or mask patterns is disclosed. The inspection device includes a light source for irradiating inspection light, a scanning unit for scanning the inspection light, an inspection light dividing unit for dividing the inspection light scanned by the scanning unit, a monitor light detecting unit for receiving one of the inspection lights divided by the inspection light dividing unit and converting the one of the inspection lights to a monitor signal, a transmitting light detecting unit for receiving a transmitting light, which has transmitted through a pattern shape, among the other inspection lights divided by the inspection light dividing unit and converting the transmitting light into a transmission detecting signal. The inspection device further comprises a waveform shaping unit for removing an alternate current component, within a primary scanning time period of the scanning unit, of monitor signals outputted from the monitor light detecting unit at each round of the primary scanning to convert the monitor signals into a rectangular-shaped wave of an approximately constant value, and a first correction unit for dividing the transmission detecting signal by the rectangular-shaped wave, which has undergone shaping in the waveform shaping unit, as a divisor group, and a second correction unit for dividing the transmission detecting signals corrected in the first correction unit with predetermined reference transmitting signals as a divisor group and outputting the results of said division as an inspection image.
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