| 摘要 |
PROBLEM TO BE SOLVED: To provide a rod dismounting apparatus capable of carrying out a set of two silicon rods, which is standing close together in a massed state in a vapor growing furnace for preparing a polycrystal silicon rods for semiconductors, outside the furnace efficiently and safely with a small load. SOLUTION: A balanced loading and unloading device that has a balancer arm 22 of a multi-knuckle structure and that is capable of moving cargoes hung at a manipulation part 23 of the end part of the arm without any load to a three-dimensional direction is set on a moving truck. A rod retention part 30 with a grasping mechanism capable of simultaneously fixing the set of two silicon rods 40 at the front side is fitted to the balanced loading and unloading device. The rod retention part 30 is able to rotate around horizontal axis until the fixed set of two silicon rods 40 becomes almost horizontal position and is able to move oscillationally around the perpendicular axis.
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