INK-JET PRINTER HEAD WITH HEMISPHERIC INK CHAMBER AND MANUFACTURING METHOD OF THE SAME USING SOI WAFER

摘要

PURPOSE: An ink-jet printer head with hemispheric ink chamber and manufacturing method of the same using silicon on insulator(SOI) wafer are provided to reinforce structure of an ink discharge part. CONSTITUTION: A printer head includes a manifold(122) supplying ink(180), an ink chamber(124) hemispheric and filled with the ink to be discharged and an ink channel(126) supplying the ink from the manifold to the ink chamber, all of which are integrally formed on a first base plate(111); a nozzle(130) formed on an oxidized membrane(112) and a second base plate(113) corresponding with a center of the ink chamber to discharge the ink; a heat insulating wall(142) formed on the second base plate and limiting a part of the second base plate annularly to form an annular heater(140) surrounding the nozzle; a heater protective membrane(150) layered on the second base plate to protect the heater; and an electrode formed on the heater protective membrane and electrically connected with the heater to impress current to the heater.