| 摘要 |
PROBLEM TO BE SOLVED: To transfer works such as a semiconductor pellet or the like at high speed from a work pick up position to a work release position. SOLUTION: An arm rotating shaft 3 is rotatably mounted to a X-Y drive board 2. An arm 4 is attached to the arm rotating shaft 3. To both edges of the arm 4, heads 5a and 5b those are movable and rotatable to the axial direction of the arm 4 are mounted. The head 5a (or 5b) vacuum-suck the work W at a work position P1 and another head 5b (5a) bond the work W at the work release position P2. The center of rotation is the middle point (L1=L2) of the segment L connecting the center of both heads 5a and 5b.
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