Laser processing apparatus and method

摘要

A controller outputs a first event signal having a periodical waveform and a second event signal having a periodical waveform synchronizing with the first event signal. A first laser source radiates a first pulse laser beam having a wavelength in an ultraviolet range, synchronously with the first event signal. A second laser source radiates a second pulse laser beam having a wavelength in the ultraviolet range, synchronously with the second event signal. A converging optical system converges the first and second pulse laser beams at the same point. A holder holds a workpiece at a position where a pulse laser beam converged by the converging optical system is applied.