| 摘要 |
PROBLEM TO BE SOLVED: To avoid the erroneous detection by irregular reflection in a three- dimensional measurement by straight light. SOLUTION: The scattered light in the emission of a straight light 2 to a measuring matter 5, 32 is received by an element 23, and the shape of the measuring matter 5, 32 is measured from the characteristic value corresponding to the height of the measuring matter 5, 32 outputted by the difference in light receiving position. The light receiving position of the element 23 and the slippage between the light receiving position and the irradiation position of the measuring matter 5, 32 are detected. On the basis of the detected slippage, it is judged whether the scattered light detected by the element 23 depends on irregular reflection or not, and when a scattered light by irregular reflection 20a is judged, the detection data or the height data based on the detection data are canceled. |
