AUGER ELECTRON SPECTROSCOPE ANALYZING APPARATUS AND ANALYZING METHOD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an auger electron spectroscope analyzing apparatus to identify an accurate composition ratio of a surface of a sample. SOLUTION: A vacuum container 1 for analyzing is coupled to a vacuum container 2 for pre-processing the sample through a gate valve 3. The vacuum container 1 comprises a sample stage system 4, an electron gun 5, an ion gun 6 and an auger electron detector 7. The vacuum container 2 comprises an ultraviolet ray lamp source 8 and a sample carrying system 9. An ultraviolet ray light from the ultraviolet ray lamp source 8 irradiates a surface of the sample. Only organic contaminated layer existing on the surface of the sample is removed. The sample is carried to the vacuum container 1 by using the sample carrying system 9. An electron beam radiated from the electron gun 5 irradiates the surface of the sample. An auger electron spectrum is measured by the auger electron detector 7. A chemical state and the composition ratio of a metal surface on an outermost surface of the sample in a minute region are found.