| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a production method capable of easily giving a gray tone mask having high uniformity of thickness of a transmittance controlling film. SOLUTION: A transmittance controlling film 12 (CrO or the like), a transmittance lowering film 13 (Cr or the like) and a resist film 14 are successively formed on a transparent substrate 11. The resist on a part where a light transmissive part is formed (area C) is removed and the transmittance lowering film 13 and the transmittance controlling film 12 on this part are removed to form the light transmissive part. The resist on a part where a gray tone part is formed (area A) is then removed and the transmittance lowering film 13 on this part is removed to form the gray tone part. The objective gray tone mask is thus produced.</p> |
