发明名称 SEMICONDUCTOR DEVICE AND ITS FABRICATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a nonvolatile storage semiconductor device, in which information is not lost or rewritten readily by an electron captured into a silicon nitride film directly above the source and drain. SOLUTION: The semiconductor device comprises memory transistors, each comprising a drain 7 and a source 8 formed in the surface of a semiconductor substrate 1, an insulation film 5 formed over the drain and source, and a gate electrode provided on the insulation film wherein a region 14 impeding movement of electrons is provide at a part of the gate insulation film between the source and drain.
申请公布号 JP2002190535(A) 申请公布日期 2002.07.05
申请号 JP20000388799 申请日期 2000.12.21
申请人 MITSUBISHI ELECTRIC CORP 发明人 KOBAYASHI KIYOTERU
分类号 H01L21/8247;H01L21/336;H01L21/8246;H01L27/115;H01L29/76;H01L29/788;H01L29/792;H01L29/94;H01L31/062;H01L31/113;H01L31/119;(IPC1-7):H01L21/824 主分类号 H01L21/8247
代理机构 代理人
主权项
地址