发明名称 IMAGE SENSOR CAPABLE OF ENLARGING PHOTO-DIODE AREA AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: An image sensor capable of enlarging a photo-diode area and a manufacturing method thereof are provided to enlarge an effective photo-diode area without enlarging a photo-diode area in a semiconductor substrate so that photo-sensitivity may be improved. CONSTITUTION: An image sensor comprises a first conductive semiconductor substrate(40), isolation layers(41) formed on the first conductive semiconductor substrate(40), a photodiode(44) made of an n-type dopant region and a p-type dopant region formed in the first conductive semiconductor substrate(40), a gate electrode(43) mounted on a gate insulating layer(42), an interlayer dielectric(48) coating the isolation layers(41), the photodiode(44), and the gate electrode(43), and a semiconductor layer(49) as a photodetector formed on the interlayer dielectric(48) to overlap the isolation layers(41) and the gate electrode(43) and connected with the photodiode(44) through the interlayer dielectric(48). At this point, the semiconductor layer(49) increases the effective surface of the photodiode(44), thereby improving photo-sensitivity.
申请公布号 KR20020052792(A) 申请公布日期 2002.07.04
申请号 KR20000082237 申请日期 2000.12.26
申请人 HYNIX SEMICONDUCTOR INC. 发明人 HWANG, JUN
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
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