SELF-ALIGNED DOUBLE-SIDED VERTICAL MIMCAP

摘要

A vertical MIM capacitor (140) including a first conductive line (124) and second conductive line (136) sandwiched around a vertical portion of a capacitor dielectric (134). Additional conductive lines (136) may be positioned vertically proximate first conductive lines (124) separated by another vertical portion of capacitor dielectric (134) to form a double-sided capacitor (142), increasing the capacitance. A plurality of vertical MIMcaps (140, 142) may be coupled together in parallel to increase the capacitance.