发明名称 |
Dendritic polymers and making method |
摘要 |
A dendritic or hyperbranched polymer having a weight average molecular weight of 500-10,000,000 is prepared by polymerizing a hydroxystyrene derivative, adding a branching monomer midway in the polymerization step to introduce branch chains, and repeating the polymerizing and branching steps. The polymer is advantageously used as the base resin of resist material because the size of the polymer can be reduced while maintaining strength.
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申请公布号 |
US6414101(B1) |
申请公布日期 |
2002.07.02 |
申请号 |
US20000535166 |
申请日期 |
2000.03.24 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
WATANABE OSAMU;TAKEDA TAKANOBU;HATAKEYAMA JUN;KOBAYASHI TOMOHIRO;ISHIHARA TOSHINOBU;WATANABE JUN |
分类号 |
C08F257/02;C08F290/04;C08F297/02;(IPC1-7):C08F212/14;C08F257/00 |
主分类号 |
C08F257/02 |
代理机构 |
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