| 摘要 |
PROBLEM TO BE SOLVED: To enhance power efficiency when forming a plasma. SOLUTION: An antenna 30 which supplies an electromagnetic field within a treatment container 11 is equipped with a conductor plate 32 forming a resonator, an earth plate 31 arranged in opposite relation to the conductor plate 32 and a plurality of feeders 41A, 41B connected to the conductor plate 32. The feeders 41A, 41B are connected to each other with a space on a straight line perpendicular to the outer periphery of the conductor plate 32. Supposing that a wavelength of an electromagnetic field generated between the conductor plate 32 and the earth plate 31 is λg, the length of the straight line by which the feeders 41A, 41B are connected is approximately (N+1/2)×λg, (wherein, N is an integer of 0 or greater). |
