| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-frequency coil, by which Q can be made higher and the variance of inductance can be suppressed, and high reliability and productivity are obtained also. SOLUTION: When a conductor layer and an organic insulation layer are laminated alternately on an insulative substrate for manufacturing a high-frequency coil, a process for manufacturing the conductor layer includes a step (1) of base formation, to form a base conductor layer 11 for plating of 5μm or less over the entire side surface of the insulating substrate 10, a step (2) of resist formation to form a photosensitive dry film 12 on the base conductor layer 11, a step (3) of patterning to remove a coil conductor pattern part of the dry film 12 by photolithographic method, a step (4) of electrolytic plating to form a coil conductor layer 14 in the removed coil conductor pattern part of the dry film 12, a step (5) of resist removal to remove the dry film, and a step (6) of base removal to remove the unwanted part of the base conductor layer 11 by etching.
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