摘要 |
<p>A microphone assembly comprising a housing (20), the housing (20) including an upper lip (18), a silicon backplate (12), a silicon spacer (14, 15) integrally formed with the backplate and comprising at least one protrusion and an insulating layer (30), such as silicon dioxide or a fluoropolymer. A single diaphragm (10) having a metallized polymer film, acting as both a protective environmental barrier and a sensing electrode of a capacitive electroacoustic sensing transducer.</p> |