| 摘要 |
A shape measuring method and unit measures position information, in a normal direction of the surface of the object W, of the surface of the object W along a plurality of paths which extend from a plurality of respective points PnS (n=1 through 4) on the surface of the object W outward from the object. As a result, for each of the plurality of paths a measurement waveform which varies characteristically on the boundary between a predetermined area and the other area is obtained. Subsequently, by analyzing the measurement results, boundary positions between the predetermined area and the other area are obtained, the number of the boundary positions being equal to that of the paths. And the shape of the predetermined area is determined based on the boundary positions obtained, and thus the shape of the predetermined area on the surface of the object W can be accurately measured.
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