METHOD AND DEVICE FOR INSPECTING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent excessive defect determination from being caused by a defect of a testing device itself built in a semiconductor device having a built-in testing function. SOLUTION: This inspection method includes the first process 39 for determining the quality determined as a defective when either of results in self-diagnosis for an inspection function part of a semiconductor element having the built-in testing function and a test for a main body circuit part by the inspection function is defective, and for storing it, the second process 41 for carrying out the test for the main body circuit part to conduct the quality determination as to all the semiconductor elements determined as the defectives in the first process 39 based on a testing signal from the outside, and tire third process 43 for determining as a non-defective the semiconductor element of which the main body circuit part is determined as a non-defective in the second process 41 out of the semiconductor elements determined as the defectives in the first process 39.