| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room in which phosphorus compound and boron compound are not present. SOLUTION: At least the surface material of a wall and a floor of which a clean room consists, a filter medium of an air filter, and a sealant to seal a space between the filter medium and a frame are formed of a material which does not discharge organic phosphorus compounds or boron compounds.
|
