LASER CLEANING METHOD, METHOD OF MANUFACTURING RETICLE SUBSTRATE AND LASER CLEANING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To remove the foreign matter sticking to the surfaces of reticle substrates and the like. SOLUTION: This method has a dropping process step (S4) of dropping a prescribed amount of liquid drops to the position deposited with the foreign matter of the surface of a previously perceived work W and a process step (S6) of removing the foreign matter by irradiating the position deposited with the foreign matter with a laser beam L having energy capable of evaporating at least the liquid drops described above.