| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive high-performance illuminator which can be mounted on an inspection device such as a microscope as an illuminator using a fly-eye lens. SOLUTION: The fly-eyes lenses 12 and 13 are held by the holding frames 21 and 22 of the fly-eye lens unit 20. By rotating the holding frame 22 in which the lens 13 is held with respect to a coupling member 23, space between the lenses 12 and 13 is adjusted. By rotating the member 23 in which the frame 22 is fixed with respect to the frame 21, rotational deviation between the lenses 12 and 13 is adjusted. The deviation in (xy) directions between the lenses 12 and 13 is adjusted by adjusting screws 27a and 27b provided in the frame 22.
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