| 摘要 |
PROBLEM TO BE SOLVED: To restrain natural oxidation of a semiconductor device by taking a natural oxide film preventive countermeasure in a semiconductor device storage device such as a stocker. SOLUTION: A characteristic of the stocker of a first embodiment is that light shielding performance is imparted to an outer wall 2 of the stocker 1 with excellent sealing performance. A black synthetic resin plate or a metallic plate such as stainless steel is used as the light shielding outer wall 2. The stocker 1 is arranged in a bright clean room having a window by using such a light shielding outer wall 2, and even if a transparent plastic cassette 3 is stored in the stocker, promotion of the natural oxidation by the light can be restrained.
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