| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that an inspection process speed increasingly becomes unable to meet diversification and speed-up of a manufacturing process. SOLUTION: A visual inspection apparatus 10 includes a main unit 12 and a test unit 14. A support stage 22 where a substrate 1 as a body to be inspected is held, a stepping motor 20, a line sensor 34, etc., are set to the test unit 14. A memory 44, an analysis unit 46, etc., are set to the main unit 12. The analysis unit 46 analyzes images on the basis of criteria or an inspection file. A history- recording unit 51 records a history of the inspection file. |
