发明名称 |
Semiconductor device, display apparatus using such devices and method of manufacturing such a device as well as that of manufacturing such an apparatus |
摘要 |
A semiconductor device comprises a contact hole for connecting electroconductive films having a stepped profile with the top having a size greater than the bottom, the top size of the contact hole being defined in a self-aligning manner by another film disposed between said electroconductive films.
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申请公布号 |
US6411349(B2) |
申请公布日期 |
2002.06.25 |
申请号 |
US19980177606 |
申请日期 |
1998.10.23 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
NAKAZAWA TORU;KUREMATSU KATSUMI;KOYAMA OSAMU |
分类号 |
G02F1/13;G02F1/136;G02F1/1362;G02F1/1368;G09F9/30;H01L21/768;H01L23/522;(IPC1-7):G02F1/136;H01L29/04 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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